Confocal Scanning Raman Spectrometer with AFM option.

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The main advantages of the system are:

  1. Compact size.
  2. Full automation of the system.
  3. The original design of the spectrometer.
  4. High light transmission of the device with minimal optical loss.
  5. The confocal circuit is made according to the original scheme, provides compact dimensions and minimal drifts of optical elements.
  6. Built-in optical microscope provides a convenient search for a place for measurements.
  7. The design uses precision mechanical components and optics.
  8. Can be used both in industrial laboratories and in research universities.
  9. Base configuration price 200 000 USD.


The main components of the system are:

A. An automated base with a built-in flat scanner for the sample.

B. The confocal module containing the optical circuit of the excitation beam formation and the secondary (Raman radiation) detection channel.

C. Highly sensitive CCD sensor with deep cooling for recording secondary radiation spectra.

D. Trinocular optical microscope with the ability to observe the sample in both the eyepieces and the video camera.

E. Solid-state excitation laser, optional 355 nm, 473 nm, 532 nm, 785 nm. For connection of external lasers with other lines one-mode transport optical fiber is used.

F. Monochromator

G. Atomic Force Head for recording the signals of the sample topography.

H. PMU single-channel detector.

I. HeNe laser as a base for Raman spectroscopy.

Optical scheme

Optical sensitivity:

Spectral Resolution and range. HgNe calibration lamp spectra.

Surface optical maping:

Laser confocal maping. Sample Si/SiO2 grating .

Raman maping. Образец Si/SiO2 grating.

Atomic Force microscopy maping:

Base Specification:

AFM resolution
< 1 nm
Z AFM resolution
<0.1 nm
Scanning range
100x100x15 mkm
Secondary emission spectral range
100..5000 cm-1
Spectral resolution
<1 cm-1
Optical throughput
Exitation laser
532 nm
Detector Andor iVac 324 FI

Pixels number
1560x200 pixels
Pixel size
16 mkm
Cooling till -60o
CCD read noise
5.8 e
dark curent
0.0028 e/pix/s
Мах speed
269 spectra/s
Monochromator  Andor Shamrock 500 i
Focal distance
500 mm
Diff. gratings
150   lines/mm Blaze WL = 500 nm,  resolution = 0.52 nm
600   lines/mm Blaze WL = 500 nm,  resolution = 0.13 nm
1800 lines/mm Blaze WL = 380 nm,  resolution = 0.04 nm
Input pinhole
Constant 100 mkm
Laser Cobolt
Type NdYg
532.8 nm
Power 25 мВт
Linght width
< 1 pm
Upright optical microscope Olympus BX51
Illumination system
Diod source
Illumination Type
Eyepiece widefield с 10х/24 mm
50-70 mm
Trinocular with light path selector
Prizm 0:100, 50:50
Focus system
100 nm
VideoCamera Moticam 2X
1/2” CMOS
Resolution, px 2500x1800
ADC resolution
12 бит
Pixrl size
2.5 мкм
Interface WiFi
Microobjective module
Type Turret for 4 objectives
Objective 1
Optical amplification 50x
N.A. 0.35
WD 18 mm
Objective 2
Optical amplification 100x
N.A. 0.9
WD 1 mm
Sample positioning
Type Motorized XYZ
Range 10x10x10mm
Accuracy 1mkm
AFM head positioning
Type Motorized XY
Range 10x10mm
Accuracy 1mkm
Optical, AFM, scanning system
Тype Flat XYZ stage
80μmx80μmx15 μm
< 0.01nm
< 1nm
image nonlinearity
Position sensors

Optical encoders with sin/cos interpolation, 300 kHz

sampling rate, built-in autocallibration

AFM unit, AFM head Certus

PSD sensor 4 sectioned PD
Laser spot arrangement 2 micro screws with 0,125 mm pitch
PSD arrangement 2 micro screws with 0,125 mm pitch
Tip scanning system is optional